Beskrivelse

Servomex – Measuring Ultra Trace Oxygen

Designed to measure ultra-trace oxygen to the very lowest levels, the DF-560E delivers the semiconductor industry an industry-leading 45ppt Lower Detection Limit (LDL). Flexible and adaptable, the DF-560E is able to monitor O2 in multiple background gases while logging data in a variety of formats.

• Broad detection range: 0-1ppb – 0-20ppm
• Monitors multiple background gases with a single unit
• Sensor compensates for sample and flow rate fluctuations – ideal for upset prone applications
• Operable via front panel or digital communication options